Adaptive Sequential Test Planning for Multi-Mechanism Reliability Qualification via Bayesian Monte Carlo Tree Search· 多机制可靠性认证的自适应顺序测试规划

Reliability qualification of advanced semiconductor devices requires sequential stress decisions that balance characterization objectives against multiple competing failure mechanisms. Current practice relies on static test plans derived from population-level acceleration models, which cannot adapt to per-unit variability or real-time degradation observations. This paper presents a closed-loop adaptive test planning framework that formulates reliability qualification as a partially observable sequential decision problem and solves it using Monte Carlo tree search for seed-action simulators (MCTS-SA) coupled with extended Kalman filter (EKF) belief-state estimation. The framework models stochastic, per-device variability in bias temperature instability (BTI), electromigration (EM), and time